@conference{1253251,
  author = {Nathan Nakamura and Paul Szypryt and Joseph Fowler and Zachary H. Levine and Daniel Swetz},
  title = {Nanoscale X-ray Tomography of Integrated Circuits using a Hybrid Electron/X-ray Microscope: Results and Prospects},
  year = {2023},
  month = {2023-11-20 05:11:00},
  publisher = {2023 IEEE Physical Assurance and Inspection of Electronics (PAINE), Huntsville, AL, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956624},
  doi = {https://doi.org/10.1109/PAINE58317.2023.10318004},
  language = {en},
}