@misc{1253456,
  author = {Charles S. Tarrio and Steven Grantham and Rob Vest and Thomas A. Germer and Bryan Barnes and Stephanie Moffitt and Brian Simonds and Matthew Spidell},
  title = {NIST efforts in extreme-ultraviolet metrology},
  year = {2023},
  month = {2023-11-21 05:11:00},
  publisher = {Proceedings of the SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956924},
  doi = {https://doi.org/10.1117/12.2686832},
  language = {en},
}