@conference{125491,
  author = {R Gupta and J Burnett and U Griesmann and J Dehmer and J Roberts},
  title = {Refractive Index of Fused Silica and Calcium Fluoride Near 193 nm},
  year = {1997},
  month = {1997-01-01},
  publisher = {Third International Symposium on 193 nm Lithography , Okada, JA},
  language = {en},
}