@article{1255171,
  author = {Thomas P. Moffat and Trevor Braun and David Raciti and Daniel Josell},
  title = {Superconformal Film Growth: From Smoothing Surfaces to Interconnect Technology},
  year = {2023},
  month = {2023-04-20 04:04:00},
  publisher = {Accounts of Chemical Research},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936061},
  language = {en},
}