@article{125546,
  author = {Thomas Germer},
  title = {Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers, ed. by J. C. Stover},
  year = {1998},
  number = {3275},
  month = {1998-01-01},
  publisher = {SPIE},
  language = {en},
}