@conference{125581,
  author = {Thomas Germer},
  title = {Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula},
  year = {2001},
  month = {2001-01-01},
  publisher = {Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA},
  language = {en},
}