@conference{125596,
  author = {Thomas Germer},
  title = {Measurement of Lithographic Overlay by Light Scattering Ellipsometry, ed. by Z.H. Gu and A.A. Maradudin},
  year = {2002},
  month = {2002-01-01},
  publisher = {Surface Scattering and Diffraction for Advanced Metrology II , Seattle, WA},
  language = {en},
}