@conference{125616,
  author = {Thomas Germer and M Fasolka},
  title = {Characterizing Surface Roughness of Thin Films By Polarized Light Scattering, ed. by A. Duparr {?} and B. Singh},
  year = {2003},
  month = {2003-01-01},
  publisher = {Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies , San Diego, CA},
  language = {en},
}