@conference{1257791,
  author = {Stephanie Moffitt and Bryan Barnes and Thomas A. Germer and Steven Grantham and Eric Shirley and Martin Sohn and Daniel Sunday and Charles S. Tarrio},
  title = {Instrument Development for Spectroscopic Ellipsometry and Diffractometry in the EUV},
  year = {2024},
  month = {2024-04-24 04:04:00},
  publisher = {International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957261},
  language = {en},
}