@conference{1258766,
  author = {M. Wahidur Rahman and Gregory W. Vogl and Xiaodong Jia and Yongzhi Qu},
  title = {Physics-Informed Multi-Task Learning for Material Removal Rate Prediction in Semiconductor Chemical Mechanical Planarization},
  year = {2024},
  month = {2024-08-13 04:08:00},
  publisher = {Proceedings of the 2024 IEEE International Conference on Prognostics and Health Management (ICPHM), Spokane, WA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957637},
  doi = {https://doi.org/10.1109/ICPHM61352.2024.10627679},
  language = {en},
}