@conference{1264546, author = {Erik Secula and James Liddle}, title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2022}, year = {2024}, month = {2024-12-05 12:12:56}, publisher = {Frontiers of Characterization and Metrology for Nanoelectronics: 2022, Monterey, CA, US}, language = {en}, }