@article{1271791,
  author = {Jodie Gail Pope and Keith A. Gillis and Aaron Johnson and Joey Boyd and John Wright},
  title = {SLowFlowS: A novel flow standard for semiconductor process gases},
  year = {2025},
  month = {2025-03-01 05:03:00},
  publisher = {Flow Measurement and Instrumentation},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958370},
  doi = {https://doi.org/10.1016/j.flowmeasinst.2025.102831},
  language = {en},
}