@conference{1274231,
  author = {Peter Bajcsy and Brycie Wiseman and Michael Paul Majurski and Andras Vladar},
  title = {Detection limits of AI-based SEM dimensional metrology},
  year = {2025},
  month = {2025-03-14 04:03:00},
  publisher = {SPIE conference: Advanced Lithography + Patterning, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958576},
  language = {en},
}