@article{1275726,
  author = {John Diulus and Carles Corbella Roca and Feng Yi and David LaVan and Berc Kalanyan and Mark McLean and Lakshmi Ravi Narayan and William Osborn and James Maslar and Andrei Kolmakov},
  title = {Nanocalorimetry for plasma metrology relevant to semiconductor fabrication},
  year = {2025},
  number = {43},
  month = {2025-02-04 05:02:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958828},
  doi = {https://doi.org/10.1116/6.0004294},
  language = {en},
}