@conference{1277961,
  author = {Bryan Barnes and Aaron Chew and Nicholas Jenkins and Yunzhe Shao and Martin Sohn and Regis Kline and Daniel Sunday and Purnima Balakrishnan and Thomas Germer and Steven Grantham and Clay Klein and Stephanie Moffitt and Eric Shirley and Henry Kapteyn and Margaret Murnane},
  title = {Lab-based multi-wavelength EUV diffractometry for critical dimension metrology},
  year = {2025},
  number = {13426},
  month = {2025-04-24 04:04:00},
  publisher = {Metrology, Inspection, and Process Control XXXIX, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=959709},
  doi = {https://doi.org/10.1117/12.3050342},
  language = {en},
}