@article{139496,
  author = {A Schwabedissen and Eric Benck and J Roberts},
  title = {The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas},
  year = {1997},
  number = {56},
  month = {1997-01-01},
  publisher = {Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)},
  language = {en},
}