@article{140626,
  author = {John Burnett and R Gupta and U Griesmann and T Jou},
  title = {Index of Refraction and its Temperature Dependence of Calcium Fluoride Near 157 nm, ed. by Luc Van den Hove},
  year = {1999},
  number = {3679},
  month = {1999-01-01},
  publisher = {Optical Microlithography XII Proc SPIE 3679},
  language = {en},
}