@article{144111,
  author = {Eric Benck and A Schwabedissen and A. Gates and J Roberts},
  title = {Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge},
  year = {1998},
  number = {16},
  month = {1998-01-01},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}