@misc{160061,
  author = {Joseph~undefined~undefined~undefined~undefined~undefined Lenhart},
  title = {Understanding Interfacial Deviations in Lithographic Pattern Profiles},
  year = {2002},
  month = {2002-02-01},
  publisher = {Understanding Interfacial Deviations in Lithographic Pattern Profiles},
  language = {en},
}