@misc{164866,
  author = {Christopher Soles},
  title = {Evolution of the Deprotection Reaction Front Profile in Chemically Amplified Photoresists},
  year = {2002},
  month = {2002-02-01},
  publisher = {Evolution of the Deprotection Reaction Front Profile in Chemically Amplified Photoresists},
  language = {en},
}