@misc{166136,
  author = {Christopher Soles and Barry Bauer and Wen-Li Wu},
  title = {X-Ray Porosimetry: A New Method for the Characterizaton of Porous Low-Dielectric-Constant Thin Films Adaptable for the Semiconductor Industry},
  year = {2003},
  number = {108 No. 2},
  month = {2003-03-01},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}