@article{167316, author = {B Hockey}, title = {Contact Damage Produced in Si and MgO by Nanoindentation}, year = {2006}, number = {12}, month = {2006-09-01}, publisher = {Microscopy and Microanalysis}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854211}, language = {en}, }