@conference{168881,
  author = {Wen-Li Wu and Eric Lin and Q Lin and M Angelopolous},
  title = {Small-Angle Neutron Scattering Measurements for the Characterization of Lithographically Prepared Structures},
  year = {2000},
  month = {2000-01-01},
  publisher = {Characterization and Metrology for ULSI Technology: 2000 International Conference,  Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853678},
  language = {en},
}