@conference{169216,
  author = {Eric Lin and Wen-Li Wu and Q Lin and M Angelopoulos},
  title = {Feature-Shape and Line-Edge Roughness Measurement of Deep Submicron Lithographic Structures Using Small-Angle Neutron Scattering},
  year = {2001},
  number = {4344},
  month = {2001-08-01},
  publisher = {Metrology, Inspection and Process Control for Microlithography, Conference | 15th | Metrology, Inspection and Process Control for Microlithography XV | SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851833},
  language = {en},
}