@article{169391,
  author = {Wen-Li Wu and Eric Lin and Q Lin and M Angelopoulos},
  title = {Small-Angle Neutron Scattering Measurements of Nanoscale Lithographic Features},
  year = {2000},
  number = {88},
  month = {2000-12-01},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851751},
  language = {en},
}