@conference{169541,
  author = {Eric Lin and V. Lee and Barry Bauer and Haonan Wang and J Wetzel and Wen-Li Wu},
  title = {Structure and Property Characterization of Low-k Dielectric Porous Thin Films Determined by X-ray Reflectivity and Small-Angle Neutron Scattering},
  year = {2000},
  number = {47(6)},
  month = {2000-01-01},
  publisher = {Characterization and Metrology for ULSI Technology : 2000 International Conference,  Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853662},
  language = {en},
}