@misc{170261,
  author = {Christopher Soles and V. Lee and Eric Lin and Wen-Li Wu},
  title = {Pore Characterization in Low-k Dielectric Films Using X-Ray Reflectivity: X-Ray Porosimetry},
  year = {2004},
  number = {33(1)},
  month = {2004-06-01},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852383},
  language = {en},
}