@article{170446,
  author = {R Hedden and V. Lee and Christopher Soles and Barry Bauer},
  title = {Characterization of Pore Structure in a Nanoporous Low-Dielectric Constant Thin Film by Neutron Scattering Porosimetry and X-ray Porosimetry},
  year = {2004},
  number = { ASAP(on-line)},
  month = {2004-01-01},
  publisher = {Langmuir},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853934},
  language = {en},
}