@conference{172921,
  author = {Zachary Levine},
  title = {X-Ray Tomography of Integrated Circuit Interconnects: Past and Future},
  year = {2001},
  month = {2001-11-01},
  publisher = {International Symposium for Testing and Failure Analysis | 27th | ISTFA 2001: Proceedings of the the 27th International Symposium for Testing and Failure Analysis, Santa Clara, CA},
  language = {en},
}