@article{173431,
  author = {D Tanenbaum and A Laracuente and Alan Gallagher},
  title = {Surface Roughening During Plasma-Enhanced Chemical-Vapor Deposition of Hydrogenated Amorphous Silicon on Crystal Silicon Substrates},
  year = {1997},
  number = {56},
  month = {1997-08-01},
  publisher = {Physical Review B (Condensed Matter and Materials Physics)},
  language = {en},
}