@conference{173571,
  author = {Thomas Germer},
  title = {Measurement of Lithographic Overlay by Light-Scattering Ellipsometry},
  year = {2002},
  month = {2002-09-01},
  publisher = {Surface Scattering and Diffraction for Advanced Metrology, Conference | 2nd | Surface Scattering and Diffraction for Advanced Metrology II | SPIE},
  language = {en},
}