@conference{173736,
  author = {P Horvath},
  title = {Polysilane Production in RF SiH<sub>4</sub> and H<sub>2</sub> - SiH<sub>4</sub> Plasmas},
  year = {2003},
  month = {2003-07-01},
  publisher = {ICPIG | 16th |  | ICPIG, Greifswald, GE},
  language = {en},
}