@article{174756,
  author = {Thomas Germer and B Scheer},
  title = {Polarization of Out-of-Plane Optical Scatter From SiO<sub>2</sub> Films Grown on Photolithographically-Generated Microrough Silicon},
  year = {1998},
  number = {3246},
  month = {1998-07-01},
  publisher = {SPIE series},
  language = {en},
}