@conference{176096,
  author = {Thomas Germer and Michael Fasolka},
  title = {Characterizing Surface Roughness of Thin Films by Polarized Light Scattering},
  year = {2003},
  number = {5188},
  month = {2003-11-01},
  publisher = {Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies | SPIE},
  language = {en},
}