@article{177526,
  author = {Eric Benck and A Goyette and Yicheng Wang},
  title = {Ion Energy Distribution and Optical Measurements in High-Density, Inductively Coupled C<sub>4</sub>F<sub>6</sub> Discharges},
  year = {2003},
  number = {94},
  month = {2003-08-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}