@article{178591,
  author = {B Nelson and Y Xu and D Williamsons and B von and A Mason and S Heck and A. Mahan and S Schmitt and Alan Gallagher and J Webb and R Reedy},
  title = {Hydrogenated amorphous silcon germanium Alloys Grown by the Hot-Wire Chemical Vapor Deposition Technique},
  year = {2000},
  number = {507},
  month = {2000-04-01},
  publisher = {Journal of the Materials Research Society},
  language = {en},
}