@conference{183971,
  author = {J Scott},
  title = {Determination of Factors Affecting HRTEM Gate Dielectric Thickness Measurement Uncertainty},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {International Conference on Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP},
  language = {en},
}