@article{188531,
  author = {Michael Postek and Andras Vladar and John Villarrubia},
  title = {Is a Production Level Scanning Electron Microscope Linewidth Standard Possible?},
  year = {2000},
  number = {3998},
  month = {2000-06-01},
  publisher = {SPIE Microlithography Conference},
  language = {en},
}