@conference{190226,
  author = {et},
  title = {Applications of Image Diagnostics to Metrology Quality Assurance and Process Control},
  year = {2003},
  number = {5042},
  month = {2003-07-01},
  publisher = {Proceedings of SPIE, Design and Process Integration for Microelectronic Manufacturing, Alexander Starikov, Editor, Santa Clara, CA},
  language = {en},
}