@conference{198546,
  author = {Rodney Leonhardt and Thomas Scott},
  title = {Deep-UV excimer laser measurements at NIST},
  year = {1995},
  number = {2439},
  month = {1995-04-01},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE),  Microlithography, Santa Clara, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24093},
  language = {en},
}