@conference{199356,
  author = {Michael Postek},
  title = {Submicrometer Dimensional Metrology in the Scanning Electron Microscope},
  year = {1987},
  number = {775},
  month = {1987-12-31},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control, Santa Clara, CA},
  language = {en},
}