@conference{199826,
  author = {Michael Postek},
  title = {Electron Detection Modes and Their Relation to Linewidth Measurement in the Scanning Electron Microscope},
  year = {1986},
  month = {1986-12-31},
  publisher = {Proc., 44th Annual Meeting, Electron Microscopy Society of America, Albuquerque, NM},
  language = {en},
}