@misc{199956,
  author = {Michael Postek},
  title = {Submicrometer Microelectronics Dimensional Metrology: Scanning Electron Microscopy},
  year = {1987},
  month = {1987-06-30},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}