@conference{205736,
  author = {Holger Laabs and Richard Jones and Marla Dowell},
  title = {Dose Meter Calibration System for 193 nm},
  year = {2002},
  month = {2002-05-01},
  publisher = {NEWRAD 2002, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30760},
  language = {en},
}