@inbook{219211,
  author = {George Mulholland and K Childs and D Narum and L LaVanier and P Lindley and B Schueler and A Diebold},
  title = {Comparison of Submicron Particle Analysis by Auger Electron Spectroscopy, Time-of-Flight Secondary Ion Mass Spectrometry, and Secondary Electron Microscopy With Energy Dispersive X-Ray Spectroscopy.},
  year = {1996},
  month = {1996-07-31},
  publisher = {Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, , -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916968},
  language = {en},
}