@book{220326,
  author = {Jason Sanabia and S Goldie and L Ratliff and Lori Goldner and John Gillaspy},
  title = {Highly Charged Ion Bombardment of Silicon Surfaces, ed. by J.L. Duggan and I.L. Morgan},
  year = {2003},
  number = {680},
  month = {2003-01-01},
  publisher = { Melville, NY, },
  language = {en},
}