@book{220736,
  author = {Michael Postek and Andras Vladar},
  title = {Critical Dimension Metrology and the Scanning Electron Microscope},
  year = {2001},
  number = {14},
  month = {2001-12-01},
  publisher = {Handbook of Silicon Semiconductor Metrology   Chapter in Handbook of Silicon Semiconductor Metrology, },
  language = {en},
}