@article{222171,
  author = {Shinichiro Muramoto and Joseph Bennett},
  title = {Low Temperature Plasma for Compositional Depth Profiling of Thin Inorganic Multilayers},
  year = {2016},
  month = {2016-09-28},
  publisher = {Surface and Interface Analysis},
  doi = {https://doi.org/10.1002/sia.6187},
  language = {en},
}