@article{231286,
  author = {Lawrence Friedman and Wen-Li Wu and Wei-En Fu and Yunsan Chien},
  title = {Reflective Small Angle Electron Scattering to Characterize Nanostructures on Opaque Substrate},
  year = {2017},
  number = {111},
  month = {2017-09-22},
  publisher = {Applied Physics Letters},
  doi = {https://doi.org/10.1063/1.4991696},
  language = {en},
}