@article{23496,
  author = {Kristen and Mark Sobolewski},
  title = {A Technique for Temperature Mapping in Fluorocarbon Plasmas Using Planar Laser-Induced Fluorescence of CF},
  year = {2004},
  number = {96},
  month = {2004-07-01},
  publisher = {Journal of Applied Physics},
  language = {en},
}